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Servo driver for voice coil motors (VCM)

We have developed a voice coil type linear motor (VCM) suitable for positioning with a movement distance of several tens of millimeters for high-speed movement and ultra-precise positioning.

1. Since there is no accumulation in the normal deviation counter, the command pulse and encoder pulse (tracking) match, and there is no phase delay between the command pattern and the tracking pattern. (Phase-Locked Loop) 2. The correlation of the two-axis driver can be traced accurately. 3. It demonstrates responsiveness even for minute feed rates. 4. Since it does not perform sampling control, it has a very fast response. 5. With a maximum of 4 MPPS and high speed, it can accommodate high-resolution encoders. 6. There is no switching noise.

  • Electron beam lithography equipment
  • Servo
  • Torque Control

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